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Master of Engineering in Engineering with a concentration in Plasma Engineering

  1. Description
  2. Application
  3. Curriculum
  4. Tuition

Program URL: https://plasmameng.engineering.illinois.edu/

Campus: Urbana-Champaign

Program Type: Master's Degree

Award Conferred: Master of Engineering

Total Number of Credit Hours: 32 Sem. Hr(s).

All of the processes which make semiconductor chips involve plasmas: etching, deposition and now lithography due to the introduction of EUV in high-volume manufacturing. Plasma Engineering is a Master of Engineering (M.Eng.) degree that prepares graduates to drive innovation and become leaders in these areas. Knowledge and experience in using and understanding plasmas is vital, but largely missing from the education of the professionals currently in the field. Finding solutions to current and future processing challenges requires a mastery of the core concepts of plasma engineering as well as topical depth in a professional focus area. This professionally-oriented master's degree helps students to develop this expertise and gain hands-on experience with a practicum or a project.


Amy McCullough 
Senior Coordinator of Master of Engineering Programs
Grainger College of Engineering
403 A-2 Engineering Hall
1308 West Green St.
Urbana, IL 61801-
Phone: (217) 300-2378
E-mail: amccul2@illinois.edu


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